Physical Chemistry Chemical Physics, 21 February 2021, Issue 7
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Journal:
Physical Chemistry Chemical Physics
Publisher: RSC
Article Title: Cooperative roles of chemical reactions and mechanical friction in chemical mechanical polishing of gallium nitride assisted by OH radicals: tight-binding quantum chemical molecular dynamics simulations
Authors: Kentaro Kawaguchi, Yang Wang, Jingxiang Xu, Yusuke Ootani, Yuji Higuchi, Nobuki Ozawa and Momoji Kubo
Paper link: https://pubs.rsc.org/en/content/articlelanding/2021/cp/d0cp05826b#!divAbstract
Journal issue link: https://pubs.rsc.org/en/journals/journalissues/cp#!issueid=cp023007&type=current&issnprint=1463-9076
Publisher: RSC
Article Title: Cooperative roles of chemical reactions and mechanical friction in chemical mechanical polishing of gallium nitride assisted by OH radicals: tight-binding quantum chemical molecular dynamics simulations
Authors: Kentaro Kawaguchi, Yang Wang, Jingxiang Xu, Yusuke Ootani, Yuji Higuchi, Nobuki Ozawa and Momoji Kubo
Paper link: https://pubs.rsc.org/en/content/articlelanding/2021/cp/d0cp05826b#!divAbstract
Journal issue link: https://pubs.rsc.org/en/journals/journalissues/cp#!issueid=cp023007&type=current&issnprint=1463-9076
