ACS Sustainable Resource Management, 28 August 2025 Volume 2, Issue 8
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Journal:
ACS Sustainable Resource Management
Publisher: ACS
Article Title: Toward Reducing CO2 Emissions from Ultra-Pure Semiconductor Gases: A Case Study of TEOS Purification Process Optimization and Renewable Feedstock Utilization
Authors: Takehiro Yamaki, Noriyuki Uchida, Thuy T. H. Nguyen, Soh Takemoto, Naoya Okada, Hiroki Hatayama, Masanaga Fukasawa, Shinji Migita and Sho Kataoka
Paper link: https://pubs.acs.org/doi/10.1021/acssusresmgt.5c00210
Journal issue link: https://pubs.acs.org/toc/asrmcd/2/8
Publisher: ACS
Article Title: Toward Reducing CO2 Emissions from Ultra-Pure Semiconductor Gases: A Case Study of TEOS Purification Process Optimization and Renewable Feedstock Utilization
Authors: Takehiro Yamaki, Noriyuki Uchida, Thuy T. H. Nguyen, Soh Takemoto, Naoya Okada, Hiroki Hatayama, Masanaga Fukasawa, Shinji Migita and Sho Kataoka
Paper link: https://pubs.acs.org/doi/10.1021/acssusresmgt.5c00210
Journal issue link: https://pubs.acs.org/toc/asrmcd/2/8
